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DateTitleAuthor(s)Full text
2003The challenges of 157 nm nanolithography: surface morphology of silicon-based copolymersSarantopoulou, Evangelia; Kollia, Zoe; Kocevar, K.; Musevic, I.; Kobe, S.; Drazic, G.; Gogolides, E.; Argitis, P.; Cefalas, Alciviadis Constantinos
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