|Title:||Optical, structural and hydrogen sensing properties of TiO2 thin films|
Kompitsas, Michael G.
|Type:||Conference Item (Conference poster)|
|Abstract:||TiO2 thin films were prepared by DC reactive magnetron sputtering in a mixture of oxygen and argon on glass and oxidized silicon substrates. The effect of annealing (300 oC, 500 oC and 700 oC for 8 h in air) on the structural and morphological (XRD, EDX, AFM) properties of TiO2 thin films are presented. In addition, the effect of Pt surface modification (1, 3 and 5 nm) on hydrogen sensing was studied. In the range of temperatures from 300 oC to 500 oC crystallization starts and the thin film structure changes from amorphous to polycrystalline (anatase phase). In the case of samples on glass substrate, the optical transmittance spectra were recorded and energy band gap was estimated. TiO2 thin films were used as sensors towards hydrogen at concentrations 10000-1000 ppm and working temperatures within the range 180-200 oC. The samples with 1 nm and especially with 3 nm Pt on the surface responded fast at with high sensitivity to hydrogen.|
|Subject Category:||Science::Physical and theoretical chemistry|
|Source:||2nd International Symposium on Transparent Conductive Oxides, Hersonissos, Crete 22 - 26 October, 2008|
Follow EKT at: