@article{Gyorgy_Ristoscu_Mihailescu_Klini_Vainos_Fotakis_Ghica_Schmerber_Faerber_2001, title={Role of laser pulse duration and gas pressure in deposition of AIN thin films}, volume={90}, ISSN={0021-8979}, archiveLocation={Ινστιτούτο Θεωρητικής και Φυσικής Χημείας (ΙΘΦΧ) - Επιστημονικό έργο}, url={https://hdl.handle.net/10442/6335}, DOI={10.1063/1.1376417}, number={1}, journal={Journal of Applied Physics}, publisher={American Institute of Physics}, author={Gyorgy, E. and Ristoscu, C. and Mihailescu, I. N. and Klini, A. and Vainos, Nikolaos A. and Fotakis, C. and Ghica, C. and Schmerber, G. and Faerber, J.}, year={2001}, pages={456–461} }