%0 Journal Article %A Cefalas, Alciviadis Constantinos%A %A Sarantopoulou, Evangelia%A %A Argitis, P.%A %A Gogolides, E. %D 1999 %T Mass spectroscopic and degassing characteristics of polymeric materials for 157 nm photolithography %J Applied Physics A: materials science & processing %V 69 %@ 0947-8396 %R 10.1007/s003399900358 %I Springer %P S929–S933 %U https://hdl.handle.net/10442/7009 %> Αποθετήριο Ήλιος / ΕΙΕ