TY - JOUR ID - 10442/6714 A1 - Cefalas, A. C. A1 - A1 - Sarantopoulou, E. Y1 - 2000/// T1 - 157 nm photodissociation of polyamides JF - Microelectronic Engineering VL - 53 IS - 1–4 PB - Elsevier BV SP - 465–468EP - UR - https://hdl.handle.net/10442/6714 ER -