Εξειδίκευση τύπου :	Ανακοίνωση σε συνέδριο
Τίτλος:	VUV spectroscopy of nominally pure and rare-earth ions doped LiCaAlF6 single crystals as promising materials for 157 nm photolithography
Δημιουργός/Συγγραφέας:	[EL] Κεφαλάς, Αλκιβιάδης Κωνσταντίνος[EN] Cefalas, Alciviadis Constantinos [EL] Σαραντοπούλου, Ευαγγελία[EN] Sarantopoulou, Evangelia [EL] Κόλλια, Ζωή[EN] Kollia, Zoe Yu, R Abdulsabirov, R. Y. Korbleva, SL Naumov, AK Semashko, VV Kobe, S McGuiness, PJ
Επιμελητής έκδοσης:	Kaplyanskii, AA Malkin, BZ Nikitin, SI
Εκδότης:	South P I East - International Society for Optical Engineering
Τόπος έκδοσης:	BELLINGHAM
Ημερομηνία:	2002
Γλώσσα:	Αγγλικά
ISBN:	0-8194-4533-9
ISSN:	0277-786X
DOI:	10.1117/12.475332
Περίληψη:	Recently it was found that birefringence is induced in CaF2 crystals when they are illuminated with laser light at 157 nm. Taking into consideration that CaF2 is the only optical material used in 157 nm photolithography today, the possibility to use new wide band gap fluoride crystals as optical elements for 157 ran photolithography, even those of non-cubic symmetry, should be considered. Additionally, fluoride dielectric crystals with wide band gaps doped with trivalent rare-earth (RE) ions can be used as passive or active optical elements in the VUV. For doped crystals, applications depend on the structure of the energy level pattern of the 4f(n-1)5d electronic configuration and RE ion concentration. In this work we are exploring the use of wide band gap fluoride dielectric crystals doped with RE ions. The laser induced fluorescence spectrum at 157 run, and the absorption spectra of the LiCaAlF6 Crystals, pure and doped with RE ions, were investigated in the VUV region of the spectrum. A new method for monitoring RE concentration in wide band gap fluoride crystals, that is based on Vibrating Sample Magnetometer measurement (VSM), is presented as well.
Όνομα εκδήλωσης:	11th Feofilov Workshop on Spectroscopy of Crystals Activated by Rare-Earth and Transition-Metal Ions
Ημ/νία έναρξης εκδήλωσης :	2001-09-24
Ημ/νία λήξης εκδήλωσης :	2001-09-28
Τόπος εκδήλωσης:	KAZAN, RUSSIA
Τίτλος πηγής δημοσίευσης:	Xi Feofilov Symposium on Spectroscopy of Crystals Activated by Rare-earth and Transition Metal Ions
Τόμος/Κεφάλαιο:	4766
Σελίδες:	171-178
Θεματική Κατηγορία:	[EL] Οπτική. Φώς[EN] Optics. Light
Λέξεις-Κλειδιά:	VUV spectroscopy 157 nm photolithography Fluoride crystals Rare-earth ions
Αξιολόγηση από ομότιμους (peer reviewed):	Ναι
Κάτοχος πνευματικών δικαιωμάτων:	© SPIE-INT SOC OPTICAL ENGINEERING
Εμφανίζεται στις συλλογές:	Ινστιτούτο Θεωρητικής και Φυσικής Χημείας (ΙΘΦΧ) - Επιστημονικό έργο